Enhanced fatigue and retention in ferroelectric thin-film memory capacitors by post-top-electrode anneal treatment
Author(s) -
Sarita Thakoor
Publication year - 1994
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.355696
Subject(s) - materials science , ferroelectricity , lead zirconate titanate , electrode , capacitor , optoelectronics , ferroelectric capacitor , non volatile memory , thin film , polarization (electrochemistry) , ferroelectric ram , composite material , voltage , dielectric , electrical engineering , nanotechnology , chemistry , engineering
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