Optical temperature measurements on thin freestanding silicon membranes | Zendy

Markus Schmotz | Zendy; Patrick Bookjans | Zendy; Elke Scheer | Zendy; P. Leǐderer | Zendy

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Optical temperature measurements on thin freestanding silicon membranes

Author(s) -

Markus Schmotz,

Patrick Bookjans,

Elke Scheer,

P. Leǐderer

Publication year - 2010

Publication title -

review of scientific instruments

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.605

H-Index - 165

eISSN - 1089-7623

pISSN - 0034-6748

DOI - 10.1063/1.3499503

Subject(s) - materials science , nanosecond , silicon , membrane , micrometer , diffraction , thermal diffusivity , optics , grating , thermal , optoelectronics , thermal conductivity , thin film , nanotechnology , laser , composite material , thermodynamics , chemistry , biochemistry , physics

We report on a contactless, all-optical method to derive thermal properties of 340 nm thin, 640×640 μm(2) wide, freestanding silicon membranes. Exploiting the temperature dependent optical transmissivity of 4×10(-3)/K between 300 and 470 K, we are able to measure the temperature of the membrane with millikelvin thermal, micrometer lateral, and nanosecond temporal resolution. Experiments such as the decay of a transient thermal grating with spacings between 5 and 30 μm, measured in first order of diffraction, as well as heat diffusion in a statically heated membrane are reported in this letter. For the latter case an example of a nanostructured membrane by means of focused ion beam milling is given.

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