Open AccessErratum:‘‘Focused ion beam stimulated deposition of aluminum from trialkylamine alanes’’ [J. Appl. Phys. 6 8, 4820 (1990)]
Author(s) -
M. E. Gross,
L. R. Harriott,
R. L. Opila
Publication year - 1991
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.348978
Subject(s) - deposition (geology) , ion , aluminium , ion beam , beam (structure) , chemistry , atomic physics , materials science , physics , metallurgy , optics , geology , organic chemistry , paleontology , sediment
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