Open AccessQuantitative scanning probe microscope topographies by charge linearization of the vertical actuator
Author(s) -
Andrew J. Fleming
Publication year - 2010
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.3488359
Subject(s) - actuator , piezoelectricity , scanning probe microscopy , materials science , hysteresis , non contact atomic force microscopy , voltage , scanning tunneling microscope , atomic force acoustic microscopy , piezoresponse force microscopy , microscopy , conductive atomic force microscopy , microscope , optics , optoelectronics , nanotechnology , physics , magnetic force microscope , atomic force microscopy , ferroelectricity , condensed matter physics , electrical engineering , dielectric , composite material , magnetization , quantum mechanics , magnetic field , engineering
Many forms of scanning probe microscopy require a piezoelectric actuator to vary the probe-sample distance. Examples include constant-force atomic force microscopy and constant-current scanning tunneling microscopy. In such modes, the topography of the sample is reconstructed from the voltage applied to the vertical piezoelectric actuator. However, piezoelectric actuators exhibit significant hysteresis which can produce up to 14% uncertainty in the reproduced topography. In this work, a charge drive is used to linearize the vertical piezoelectric actuator which reduces the error from 14% to 0.65%
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