Open AccessPiezoelectric-actuated, piezoresistive-sensed circular micromembranes for label-free biosensing applications
Author(s) -
Thomas Alava,
Fabrice Mathieu,
Pascal Rameil,
Yannick Morel,
Caroline Soyer,
Denis Rémiens,
Liviu Nicu
Publication year - 2010
Publication title -
applied physics letters
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.3486112
Subject(s) - microscale chemistry , piezoresistive effect , piezoelectricity , biosensor , materials science , fabrication , microfabrication , silicon , vibration , nanotechnology , acoustics , optoelectronics , composite material , physics , medicine , mathematics education , mathematics , alternative medicine , pathology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom