Open AccessA Pt–Ti–O gate Si-metal-insulator-semiconductor field-effect transistor hydrogen gas sensor
Author(s) -
Toshiyuki Usagawa,
Yota Kikuchi
Publication year - 2010
Publication title -
journal of applied physics
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.3483942
Subject(s) - materials science , hydrogen , analytical chemistry (journal) , hydrogen sensor , optoelectronics , annealing (glass) , silicon , platinum , chemistry , palladium , metallurgy , organic chemistry , biochemistry , chromatography , catalysis
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