Open AccessAnalysis of the degradation induced by focused ion Ga3+ beam for the realization of piezoelectric nanostructures
Author(s) -
Denis Rémiens,
R. H. Liang,
Caroline Soyer,
D. Deresmes,
D. Troadec,
Sébastien Quig,
Antonio Da Costa,
Rachel Desfeux
Publication year - 2010
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.3474963
Subject(s) - piezoresponse force microscopy , materials science , focused ion beam , amorphous solid , etching (microfabrication) , sputter deposition , optoelectronics , nanotechnology , piezoelectricity , nanostructure , thin film , ion beam , sputtering , ferroelectricity , ion , composite material , optics , beam (structure) , crystallography , chemistry , layer (electronics) , physics , organic chemistry , dielectric
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