Open AccessEnd-of-range defects in germanium and their role in boron deactivation
Author(s) -
Federico Panciera,
PierFrancesco Fazzini,
Manuel Collet,
Jonathan Boucher,
E. Bedel,
F. Cristiano
Publication year - 2010
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.3456537
Subject(s) - germanium , boron , annealing (glass) , materials science , epitaxy , silicon , thermal stability , solubility , analytical chemistry (journal) , chemistry , nanotechnology , optoelectronics , layer (electronics) , metallurgy , organic chemistry , chromatography
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