Open AccessRigorous extraction tunability of Si-integrated Ba0.3Sr0.7TiO3 thin film up to 60 GHz
Author(s) -
Freddy Ponchel,
Jean-Fançois Légier,
Caroline Soyer,
Denis Rémiens,
Jean Midy,
T. Lasri,
Guillaume Guéguan
Publication year - 2010
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.3454772
Subject(s) - materials science , optoelectronics , silicon , sputter deposition , impedance matching , dielectric , permittivity , thin film , dissipation factor , electrical impedance , ferroelectricity , sputtering , electrical engineering , engineering , nanotechnology
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