Open AccessErratum: ‘‘Modeling for rf discharge characteristics’’ [J. Appl. Phys. 6 3,1022(1988)]
Author(s) -
S. Maniv
Publication year - 1989
Publication title -
journal of applied physics
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.343435
Subject(s) - materials science , physics , condensed matter physics
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