Evidence for amorphous multilayered silicon obtained by deposition under modulated pressure of hydrogen | Zendy

M. Vergnat | Zendy; B. George | Zendy; A. Bruson | Zendy; G. Marchal | Zendy; Ph. Mangin | Zendy; J.J. Demai | Zendy

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Evidence for amorphous multilayered silicon obtained by deposition under modulated pressure of hydrogen

Author(s) -

M. Vergnat,

B. George,

A. Bruson,

G. Marchal,

Ph. Mangin,

J.J. Demai

Publication year - 1988

Publication title -

journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.699

H-Index - 319

eISSN - 1089-7550

pISSN - 0021-8979

DOI - 10.1063/1.341282

Subject(s) - silicon , materials science , hydrogen , amorphous silicon , scattering , deposition (geology) , nanocrystalline silicon , fabrication , amorphous solid , scanning electron microscope , optoelectronics , optics , crystallography , crystalline silicon , composite material , chemistry , medicine , paleontology , physics , alternative medicine , organic chemistry , pathology , sediment , biology

A new method of fabrication of layered structure of silicon is presented. The silicon was evaporated continuously under a modulated pressure of hydrogen. A contrast was dense and less dense silicon layers is evidenced by low‐angle x‐ray scattering and cross‐sectional electron microscopy.

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