Open AccessMetallic coatings of microelectromechanical structures at low temperatures: Stress, elasticity, and nonlinear dissipation
Author(s) -
Eddy Collin,
Johannes Kofler,
Soraya Lakhloufi,
Sébastien Pairis,
Yu. M. Bunkov,
H. Godfrin
Publication year - 2010
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.3391901
Subject(s) - materials science , cantilever , elasticity (physics) , niobium , coating , dissipation , nonlinear system , microelectromechanical systems , structural material , stress (linguistics) , composite material , aluminium , oxide , mechanics , condensed matter physics , nanotechnology , metallurgy , thermodynamics , physics , linguistics , philosophy , quantum mechanics
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