Open AccessA heterodyne interferometer for angle metrology
Author(s) -
Inseob Hahn,
M. Weilert,
X. Wang,
Renaud Goullioud
Publication year - 2010
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.3374550
Subject(s) - optics , interferometry , heterodyne (poetry) , physics , metrology , astronomical interferometer , angular resolution (graph drawing) , perpendicular , plane mirror , acoustics , geometry , mathematics , combinatorics
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