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Transverse electron guns for plasma excitation
Author(s) -
Zengqi Yu,
J. J. Rocca,
J. Meyer,
G. J. Collins
Publication year - 1982
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.331298
Subject(s) - faraday cup , cathode ray , electron gun , torr , atomic physics , plasma , beam (structure) , electron , excitation , faraday cage , materials science , electron beam induced deposition , chemistry , optics , physics , magnetic field , ion beam , nuclear physics , quantum mechanics , thermodynamics
We report a plasma gun, which generates on a continuous basis, kilowatt electron beam discharges (e.g., 0.4 A at 4 kV) in an ambient pressure 0.1–1 Torr without differential pumping. Gun design characteristics, operating parameters, and measured beam profiles are given. Electron beam generation on a pulsed basis has also been studied. More than 100 A of beam current has been measured with a Faraday cup biased to −100V. A trapped electron beam scheme for achieving efficient deposition of the electron beam energy in a gas medium is described.

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