Dielectric microwave characterizations of (Ba,Sr)TiO3 film deposited on high resistivity silicon substrate: Analysis by two-dimensional tangential finite element method | Zendy

Freddy Ponchel | Zendy; Jean Midy | Zendy; Jean-François Legier | Zendy; Caroline Soyer | Zendy; Denis Rémiens | Zendy; T. Lasri | Zendy; Guillaume Guéguan | Zendy

Open Access

Dielectric microwave characterizations of (Ba,Sr)TiO3 film deposited on high resistivity silicon substrate: Analysis by two-dimensional tangential finite element method

Author(s) -

Freddy Ponchel,

Jean Midy,

Jean-François Legier,

Caroline Soyer,

Denis Rémiens,

T. Lasri,

Guillaume Guéguan

Publication year - 2010

Publication title -

journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.699

H-Index - 319

eISSN - 1089-7550

pISSN - 0021-8979

DOI - 10.1063/1.3309423

Subject(s) - permittivity , materials science , relative permittivity , silicon , electrical resistivity and conductivity , microwave , sputter deposition , substrate (aquarium) , dielectric , coplanar waveguide , optoelectronics , scattering , thin film , composite material , sputtering , optics , electrical engineering , telecommunications , nanotechnology , oceanography , physics , geology , computer science , engineering

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