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Initial Growth Of Thin Hydrogenated Amorphous Silicon Layer On Low Conductivity Substrates Monitored By In-situ Transient Microwave Photoconductivity Measurements
Author(s) -
H. C. Neitzert,
Marinus Kunst,
Marília Caldas,
Nélson Studart
Publication year - 2010
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.3295388
Subject(s) - photoconductivity , materials science , amorphous silicon , optoelectronics , silicon , microwave , in situ , amorphous solid , conductivity , transient (computer programming) , layer (electronics) , thin film , crystalline silicon , composite material , nanotechnology , chemistry , physics , organic chemistry , quantum mechanics , computer science , operating system
The monitoring of the microwave reflection changes after pulsed laser illumination enables the in-situ characterization of important optical and electrical material parameters during the growth of intrinsic hydrogenated amorphous silicon on low conductivity substrates

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