Open AccessReply to ’’Comments on ’Raman scattering from boron‐implanted laser annealed silicon’ ’’
Author(s) -
Herbert Engstrom,
J.B. Bates
Publication year - 1981
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.329252
Subject(s) - silicon , boron , annealing (glass) , raman scattering , materials science , raman spectroscopy , laser , scattering , optics , optoelectronics , metallurgy , physics , nuclear physics
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