A macromodel for squeeze-film air damping in the free-molecule regime | Zendy

Hong Gang | Zendy; Wenjing Ye | Zendy

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A macromodel for squeeze-film air damping in the free-molecule regime

Author(s) -

Hong Gang,

Wenjing Ye

Publication year - 2010

Publication title -

physics of fluids

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.188

H-Index - 180

eISSN - 1089-7666

pISSN - 1070-6631

DOI - 10.1063/1.3275844

Subject(s) - physics , resonator , monte carlo method , quality (philosophy) , statistical physics , mechanics , optics , quantum mechanics , statistics , mathematics

A three-dimensional Monte Carlo (MC) simulation approach is developed for the accurate prediction of the squeeze-film air damping on microresonators in the free-molecule gas regime. Based on the MC simulations and the analytical traveling-time distribution, a macromodel, which relates air damping directly with device dimensions and operation parameters, is constructed. This model provides an efficient tool for the design of high-performance microresonators. The accuracy of the macromodel is validated through the modeling of the quality factors of several microresonators. It has been found that the relative errors of the quality factors of two resonators, as compared with experimental data, are 3.9\% and 5.7\%, respectively. The agreements between the macromodel results and MC simulation results, on the other hand, are excellent in all cases considered

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