Effect of hydrogen on nanoindentation-induced phase transformations in amorphous silicon

The effect of local hydrogen concentration on nanoindentation-induced phase transformations has been investigated in ion-implanted amorphous silicon (a-Si). Elevated concentrations of H ranging from 5×1018 to 5×1020 cm−3, over the depth of indentation-induced phase transformed zones have been formed in the a-Si by H ion-implantation. Indentation has been performed under conditions that result in phase transformed zones composed totally of Si-III/Si-XII in the “H-free” samples. Deformation during indentation and determination of phase transformation behavior has been examined by analysis of load/unload curves, Raman microspectroscopy, and cross-sectional transmission electron microscopy (XTEM). With increasing H content, the probability of forming Si-III/Si-XII and the volume fraction of Si-III/Si-XII decrease. XTEM shows that these reduced volumes are randomly distributed within the phase transformed zone and are surrounded by indentation-induced a-Si. For a H concentration of 5×1020 cm−3, the probability...