A scattering model for surface-textured thin films | Zendy

Klaus Jäger | Zendy; Miro Zeman | Zendy

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A scattering model for surface-textured thin films

Author(s) -

Klaus Jäger,

Miro Zeman

Publication year - 2009

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.3254239

Subject(s) - scattering , thin film , optics , surface (topology) , intensity (physics) , materials science , light scattering , born approximation , physics , mathematics , nanotechnology , geometry

We present a mathematical model that relates the surface morphology of randomly surface-textured thin films with the intensity distribution of scattered light. The model is based on the first order Born approximation [see e.g., M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University Press, Cambridge, England, 1999) ] and on Fraunhofer scattering. Scattering data of four transparent conductive oxide films with different surface textures were used to validate the model and good agreement between the experimental and calculated intensity distribution was obtained

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