High-Resolution Rutherford Backscattering Analysis of Nanoscale Thin Films | Zendy

J. D. LaRose | Zendy; Mei-Jing Huang | Zendy; Eric Bersch | Zendy; Ming Di | Zendy; Alain C. Diebold | Zendy; Steven Consiglio | Zendy; Robert D. Clark | Zendy; G. J. Leusink | Zendy; Erik M. Secula | Zendy; David G. Seiler | Zendy; Rajinder P. Khosla | Zendy; Daniel Herr | Zendy; C. Michael Garner | Zendy; Robert McDonald | Zendy

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High-Resolution Rutherford Backscattering Analysis of Nanoscale Thin Films

Author(s) -

J. D. LaRose,

Mei-Jing Huang,

Eric Bersch,

Ming Di,

Alain C. Diebold,

Steven Consiglio,

Robert D. Clark,

G. J. Leusink,

Erik M. Secula,

David G. Seiler,

Rajinder P. Khosla,

Daniel Herr,

C. Michael Garner,

Robert McDonald

Publication year - 2009

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.177

H-Index - 75

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/1.3251265

Subject(s) - spectrometer , rutherford backscattering spectrometry , materials science , resolution (logic) , ion , stopping power , spectroscopy , analytical chemistry (journal) , elastic recoil detection , elemental analysis , thin film , optics , chemistry , physics , nanotechnology , organic chemistry , chromatography , quantum mechanics , artificial intelligence , computer science

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