Helium Ion Beam Microscopy for Copper Grain Identification in BEOL Structures | Zendy

Ruud J. J. van den Boom | Zendy; Hamed Parvaneh | Zendy; Dave Voci | Zendy; Chuong Huynh | Zendy; Lewis Stern | Zendy; Kathleen Dunn | Zendy; Eric Lifshin | Zendy; Erik M. Secula | Zendy; David G. Seiler | Zendy; Rajinder P. Khosla | Zendy; Daniel Herr | Zendy; C. Michael Garner | Zendy; Robert McDonald | Zendy; Alain C. Diebold | Zendy

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Helium Ion Beam Microscopy for Copper Grain Identification in BEOL Structures

Author(s) -

Ruud J. J. van den Boom,

Hamed Parvaneh,

Dave Voci,

Chuong Huynh,

Lewis Stern,

Kathleen Dunn,

Eric Lifshin,

Erik M. Secula,

David G. Seiler,

Rajinder P. Khosla,

Daniel Herr,

C. Michael Garner,

Robert McDonald,

Alain C. Diebold

Publication year - 2009

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.177

H-Index - 75

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/1.3251241

Subject(s) - materials science , focused ion beam , dwell time , acceleration voltage , field ion microscope , microscope , optics , ion beam , image resolution , optoelectronics , signal (programming language) , beam (structure) , ion , cathode ray , electron , computer science , physics , medicine , clinical psychology , quantum mechanics , programming language

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