Open AccessAberration-corrected Electron Microscopy Imaging for Nanoelectronics Applications
Author(s) -
Christian Kisielowski,
P. Specht,
Damien Alloyeau,
Rolf Erni,
Quentin M. Ramasse,
Erik M. Secula,
David G. Seiler,
Rajinder P. Khosla,
Dan Herr,
C. Michael Garner,
Robert McDonald,
Alain C. Diebold
Publication year - 2009
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.3251226
Subject(s) - nanoelectronics , microscopy , electron microscope , optics , materials science , physics , nanotechnology , computer science , optoelectronics
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