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The response of a scanning Kelvin force microscope (SKFM) was measured with conventional micromachined silicon tips coated with Au and with advanced tips terminated with a carbon nanotube (CNT). A simple model of the SKFM predicts enhanced spatial resolution of the SKFM using a CNT terminated tip because it reduces the stray capacitance components due to the tip shank and the cantilever. SKFM measurements over abrupt boundaries between Au and silicon (with a thin silicon dioxide overlayer) show this predicted enhanced spatial resolution. The CNT‐terminated tip resolves the boundary to less than a micrometer, while the conventional Au‐coated tip smears the transition between the two materials over tens of micrometers.

Enhanced Spatial Resolution Scanning Kelvin Force Microscopy Using Conductive Carbon Nanotube Tips