Nanoscale Characterization Of Ultra-Thin Dielectrics Using Scanning Capacitance Microscopy | Zendy

Octavian Ligor | Zendy; Brice Gautier | Zendy; A. Descamps | Zendy; David F. Albertini | Zendy; L. Militaru | Zendy; Nicolas Baboux | Zendy; Erik M. Secula | Zendy; David G. Seiler | Zendy; Rajinder P. Khosla | Zendy; Daniel Herr | Zendy; C. Michael Garner | Zendy; Robert McDonald | Zendy; Alain C. Diebold | Zendy

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Nanoscale Characterization Of Ultra-Thin Dielectrics Using Scanning Capacitance Microscopy

Author(s) -

Octavian Ligor,

Brice Gautier,

A. Descamps,

David F. Albertini,

L. Militaru,

Nicolas Baboux,

Erik M. Secula,

David G. Seiler,

Rajinder P. Khosla,

Daniel Herr,

C. Michael Garner,

Robert McDonald,

Alain C. Diebold

Publication year - 2009

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.177

H-Index - 75

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/1.3251219

Subject(s) - materials science , capacitance , dielectric , characterization (materials science) , scanning capacitance microscopy , oxide , dielectric spectroscopy , nanoscopic scale , optoelectronics , electronic engineering , analytical chemistry (journal) , nanotechnology , electrode , scanning electron microscope , composite material , chemistry , scanning confocal electron microscopy , engineering , electrochemistry , chromatography , metallurgy

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