Modeling artifacts in the analysis of test semiconductor structures in atom probe tomography | Zendy

F. Vurpillot | Zendy; M. Gruber | Zendy; S. Duguay | Zendy; E. Cadel | Zendy; B. Déconihout | Zendy; Erik M. Secula | Zendy; David G. Seiler | Zendy; Rajinder P. Khosla | Zendy; Dan Herr | Zendy; C. Michael Garner | Zendy; Robert McDonald | Zendy; Alain C. Diebold | Zendy

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Modeling artifacts in the analysis of test semiconductor structures in atom probe tomography

Author(s) -

F. Vurpillot,

M. Gruber,

S. Duguay,

E. Cadel,

B. Déconihout,

Erik M. Secula,

David G. Seiler,

Rajinder P. Khosla,

Dan Herr,

C. Michael Garner,

Robert McDonald,

Alain C. Diebold

Publication year - 2009

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.177

H-Index - 75

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/1.3251216

Subject(s) - atom probe , full width at half maximum , resolution (logic) , image resolution , silicon , materials science , iterative reconstruction , atom (system on chip) , tomography , evaporation , optics , semiconductor , sample (material) , doping , optoelectronics , physics , computer science , nanotechnology , artificial intelligence , thermodynamics , embedded system , transmission electron microscopy

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