Comparison of the measurement of beam-current densities in an electron microscope using a Faraday cup and solid-state detector | Zendy

D. G. Howitt | Zendy; G. Thomas | Zendy; W. Toutolmin | Zendy

Open Access

Comparison of the measurement of beam-current densities in an electron microscope using a Faraday cup and solid-state detector

Author(s) -

D. G. Howitt,

G. Thomas,

W. Toutolmin

Publication year - 1976

Publication title -

journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.699

H-Index - 319

eISSN - 1089-7550

pISSN - 0021-8979

DOI - 10.1063/1.322795

Subject(s) - faraday cup , detector , optics , microscope , electron , electron microscope , faraday cage , cathode ray , materials science , electron beam induced deposition , environmental scanning electron microscope , electron beam induced current , beam (structure) , particle detector , physics , scanning electron microscope , magnetic field , scanning transmission electron microscopy , ion beam , nuclear physics , quantum mechanics

A Faraday cup has been constructed which is capable of accurately measuring beam‐current densities in the image plane of an electron microscope. This device has been employed to calibrate a solid‐state detector typical of those often used to measure such small electron intensities. The ability of the solid‐state detector to distinguish single electrons was found to be a sensitive function of the incident electron intensity. Important applications of this work include investigations of radiation damage in beam‐sensitive materials, e.g., biological specimens.

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