Open AccessComprehensive study on the deep depletion capacitance-voltage behavior for metal-oxide-semiconductor capacitor with ultrathin oxides
Author(s) -
Jen-Yuan Cheng,
Chiao-Ti Huang,
JennGwo Hwu
Publication year - 2009
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.3226853
Subject(s) - depletion region , capacitance , materials science , capacitor , oxide , quantum tunnelling , dielectric , substrate (aquarium) , optoelectronics , semiconductor , voltage , electrical engineering , chemistry , metallurgy , electrode , engineering , oceanography , geology
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