Resonance control of membrane reflectors with effective index engineering | Zendy

Hongjun Yang | Zendy; Santhad Chuwongin | Zendy; Zexuan Qiang | Zendy; Li Chen | Zendy; Huiqing Pang | Zendy; Zhenqiang Ma | Zendy; Weidong Zhou | Zendy

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Resonance control of membrane reflectors with effective index engineering

Author(s) -

Hongjun Yang,

Santhad Chuwongin,

Zexuan Qiang,

Li Chen,

Huiqing Pang,

Zhenqiang Ma,

Weidong Zhou

Publication year - 2009

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.3182801

Subject(s) - fano resonance , materials science , optoelectronics , broadband , resonance (particle physics) , narrowband , silicon , optics , layer (electronics) , wavelength , nanotechnology , plasmon , physics , particle physics

We report here broadband membrane reflectors based on Fano resonances in patterned silicon nanomembranes. Resonance control of the reflectors was realized either by partially removing buried oxide layer underneath the device layer or by controlled SiO2 film deposition on top of the devices. Both blueshifts and redshifts were demonstrated with a turning range of 50 nm for a center wavelength of 1550 nm. These results demonstrate practical postprocess means for Fano resonance engineering for both narrowband filters and ultracompact broadband reflectors.

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