Open AccessHigh-Q micromechanical resonators in a two-dimensional phononic crystal slab
Author(s) -
Saeed Mohammadi,
Ali A. Eftekhar,
William D. Hunt,
Ali Adibi
Publication year - 2009
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.3078284
Subject(s) - resonator , materials science , etching (microfabrication) , optoelectronics , resonance (particle physics) , silicon , slab , photonic crystal , crystal (programming language) , band gap , q factor , semiconductor , wide bandgap semiconductor , layer (electronics) , nanotechnology , physics , particle physics , geophysics , computer science , programming language
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