Open AccessDimensional considerations in achieving large quality factors for resonant silicon cantilevers in air
Author(s) -
Kianoush Naeli,
Oliver Brand
Publication year - 2009
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.3062204
Subject(s) - cantilever , thermoelastic damping , silicon , resonance (particle physics) , materials science , work (physics) , flexural strength , quality (philosophy) , atmospheric pressure , structural engineering , acoustics , mechanics , composite material , optoelectronics , physics , mechanical engineering , engineering , atomic physics , meteorology , thermal , quantum mechanics
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