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Characteristics of CoxTi1−xO2 thin films deposited by metal organic chemical vapor deposition
Author(s) -
Adam McClure,
A. Kayani,
Y. U. Idzerda,
Elke Arenholz,
Edna Mae D. Cruz
Publication year - 2008
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.2998971
Subject(s) - chemical vapor deposition , thin film , cobalt , materials science , combustion chemical vapor deposition , ferromagnetism , magnetism , metal , deposition (geology) , metalorganic vapour phase epitaxy , titanium , inorganic chemistry , carbon film , chemical engineering , chemistry , nanotechnology , metallurgy , epitaxy , layer (electronics) , condensed matter physics , paleontology , physics , sediment , engineering , biology
This paper deals with the growth and characterization of ferromagnetic cobalt doped TiO{sub 2} thin films deposited by liquid precursor metal organic chemical vapor deposition (MOCVD) using a new combination of the source materials Co(TMHD){sub 3}, tetrahydrofuran (THF), and titanium isopropoxide (TIP). An array of experiments reveals the intrinsic ferromagnetic nature of the grown films, and suggests that the magnetism is not generated by oxygen vacancies

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