Optical properties of heavily boron-doped nanocrystalline diamond films studied by spectroscopic ellipsometry | Zendy

Alexandre Zimmer | Zendy; Oliver A. Williams | Zendy; Ken Haenen | Zendy; Herman Terryn | Zendy

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Optical properties of heavily boron-doped nanocrystalline diamond films studied by spectroscopic ellipsometry

Author(s) -

Alexandre Zimmer,

Oliver A. Williams,

Ken Haenen,

Herman Terryn

Publication year - 2008

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.2990679

Subject(s) - materials science , diamond , ellipsometry , refractive index , chemical vapor deposition , boron , nanocrystalline material , molar absorptivity , silicon , material properties of diamond , carbon film , thin film , ultraviolet , doping , analytical chemistry (journal) , optoelectronics , optics , nanotechnology , chemistry , composite material , organic chemistry , chromatography , physics

The optical properties of heavily boron-doped nanocrystalline diamond films grown by microwave plasma enhanced chemical vapor deposition on silicon substrates are presented. The diamond films are characterized by spectroscopic ellipsometry within the midinfrared, visible, and near-ultraviolet regions. The ellipsometric spectra are also found to be best described by a four-phase model yielding access to the optical constants, which are found distinct from previous nanocrystalline diamond literature values. The presence of a subgap absorption yielding high extinction coefficient values defined clearly the boron incorporated films in comparison to both undoped and composite films, while refractive index values are relatively comparable.

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