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The optical properties of heavily boron-doped nanocrystalline diamond films grown by microwave plasma enhanced chemical vapor deposition on silicon substrates are presented. The diamond films are characterized by spectroscopic ellipsometry within the midinfrared, visible, and near-ultraviolet regions. The ellipsometric spectra are also found to be best described by a four-phase model yielding access to the optical constants, which are found distinct from previous nanocrystalline diamond literature values. The presence of a subgap absorption yielding high extinction coefficient values defined clearly the boron incorporated films in comparison to both undoped and composite films, while refractive index values are relatively comparable.

Optical properties of heavily boron-doped nanocrystalline diamond films studied by spectroscopic ellipsometry