Open AccessInvestigation of Apertureless NSOM for Measurement of Stress in Strained Silicon-on-Insulator Test Structures
Author(s) -
Colin McDonough,
Jacob Atesang,
Yunfei Wang,
Robert Geer,
David G. Seiler,
Alain C. Diebold,
Robert McDonald,
C. Michael Garner,
Dan Herr,
Rajinder P. Khosla,
Erik M. Secula
Publication year - 2007
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2799444
Subject(s) - materials science , silicon on insulator , raman spectroscopy , optoelectronics , raman scattering , silicon , blanket , optics , composite material , physics
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