Open AccessDevelopment of a Focused-Beam Ellipsometer Based on a New Principle
Author(s) -
Sang-Heon Ye,
Yoon Keun Kwak,
SooHyun Kim,
Hyun Mo Cho,
Yong Jai Cho,
Won Chegal,
David G. Seiler,
Alain C. Diebold,
Robert McDonald,
C. Michael Garner,
Dan Herr,
Rajinder P. Khosla,
Erik M. Secula
Publication year - 2007
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2799439
Subject(s) - ellipsometry , optics , measure (data warehouse) , point (geometry) , lens (geology) , sample (material) , beam (structure) , materials science , computer science , physics , thin film , mathematics , nanotechnology , data mining , geometry , thermodynamics
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