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Endowed with nano‐scale spatial resolution, atomic force acoustic microscopy (AFAM) provides extremely localized elastic property measurements. We advance here the applicability of AFAM for obtaining accurate elastic modulus measurements on surfaces with nano‐size features by considering the topography contribution to the AFAM signal. On nano‐size granular Au films, the elastic modulus at the grain scale has been mapped out by deconvoluting the contact geometry effect in the AFAM image. Significant variation in the contact area over granular topography arises as the probe is either in single‐or multiple‐asperity contact with the surface. By correlating the AFAM and topography images we determine variations in the elastic modulus with a lateral resolution better than 10 nm.

Effects of topography and multi-asperity contacts on nano-scale elastic property measurements by atomic force acoustic microscopy