Effects of topography and multi-asperity contacts on nano-scale elastic property measurements by atomic force acoustic microscopy
Author(s) -
Gheorghe Stan,
Robert F. Cook,
David G. Seiler,
Alain C. Diebold,
Robert McDonald,
C. Michael Garner,
Dan Herr,
Rajinder P. Khosla,
Erik M. Secula
Publication year - 2007
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2799433
Subject(s) - asperity (geotechnical engineering) , materials science , elastic modulus , modulus , atomic force acoustic microscopy , nanoscopic scale , atomic force microscopy , resolution (logic) , scale (ratio) , contact area , composite material , optics , nanotechnology , magnetic force microscope , computer science , physics , magnetization , quantum mechanics , artificial intelligence , magnetic field
Endowed with nano‐scale spatial resolution, atomic force acoustic microscopy (AFAM) provides extremely localized elastic property measurements. We advance here the applicability of AFAM for obtaining accurate elastic modulus measurements on surfaces with nano‐size features by considering the topography contribution to the AFAM signal. On nano‐size granular Au films, the elastic modulus at the grain scale has been mapped out by deconvoluting the contact geometry effect in the AFAM image. Significant variation in the contact area over granular topography arises as the probe is either in single‐or multiple‐asperity contact with the surface. By correlating the AFAM and topography images we determine variations in the elastic modulus with a lateral resolution better than 10 nm.
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