Open AccessMetrology For High-Frequency Nanoelectronics
Author(s) -
T. Mitch Wallis,
Atif Imtiaz,
Hans T. Nembach,
Paul Rice,
Pavel Kaboš,
David G. Seiler,
Alain C. Diebold,
Robert McDonald,
C. Michael Garner,
Dan Herr,
Rajinder P. Khosla,
Erik M. Secula
Publication year - 2007
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2799429
Subject(s) - nanoelectronics , materials science , carbon nanotube , metrology , characterization (materials science) , microwave , nanoscopic scale , sapphire , optoelectronics , nanotechnology , nanolithography , substrate (aquarium) , optics , fabrication , computer science , medicine , telecommunications , laser , oceanography , physics , alternative medicine , pathology , geology
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