Linewidth Measurement Based on Automatically Matched and Stitched AFM Images
Author(s) -
Wei Chu,
Joseph Fu,
Ronald G. Dixson,
Theodore V. Vorburger,
David G. Seiler,
Alain C. Diebold,
Robert McDonald,
C. Michael Garner,
Dan Herr,
Rajinder P. Khosla,
Erik M. Secula
Publication year - 2007
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2799408
Subject(s) - laser linewidth , distortion (music) , rotation (mathematics) , materials science , position (finance) , carbon nanotube , tilt (camera) , optics , sample (material) , standard deviation , image processing , measure (data warehouse) , computer science , acoustics , artificial intelligence , computer vision , image (mathematics) , nanotechnology , physics , optoelectronics , mathematics , geometry , amplifier , laser , statistics , cmos , finance , economics , thermodynamics , database
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