Open AccessZero-Order and Super-Resolved Imaging of Arrayed Nanoscale Lines using Scatterfield Microscopy
Author(s) -
Brian M. Barnes,
Ravikiran Attota,
Lowell P. Howard,
Pete Lipscomb,
Michael T. Stocker,
Richard M. Silver,
David G. Seiler,
Alain C. Diebold,
Robert McDonald,
C. Michael Garner,
Dan Herr,
Rajinder P. Khosla,
Erik M. Secula
Publication year - 2007
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2799405
Subject(s) - microscopy , optics , materials science , wafer , resolution (logic) , diffraction , image resolution , metrology , optoelectronics , computer science , physics , artificial intelligence
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