Open AccessA Laboratory Scale Critical-Dimension Small-Angle X-ray Scattering Instrument
Author(s) -
Derek Ho,
Chengqing Wang,
Eric K. Lin,
Ronald L. Jones,
WenLi Wu,
David G. Seiler,
Alain C. Diebold,
Robert McDonald,
C. Michael Garner,
Dan Herr,
Rajinder P. Khosla,
Erik M. Secula
Publication year - 2007
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2799402
Subject(s) - small angle x ray scattering , scattering , synchrotron , beamline , small angle scattering , synchrotron radiation , optics , metrology , materials science , advanced photon source , critical dimension , characterization (materials science) , scale (ratio) , physics , beam (structure) , quantum mechanics
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