Open AccessMicrowave Impedance Microscope for Non-contact Electrical Metrology of Nano-Interconnect Materials
Author(s) -
Vladimir V. Talanov,
A. Schwartz,
David G. Seiler,
Alain C. Diebold,
Robert McDonald,
C. Michael Garner,
Dan Herr,
Rajinder P. Khosla,
Erik M. Secula
Publication year - 2007
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2799400
Subject(s) - metrology , materials science , copper interconnect , interconnection , wafer , microwave , electrical impedance , microscope , electrical contacts , optoelectronics , nano , microscopy , nanotechnology , optics , electrical engineering , computer science , dielectric , composite material , engineering , physics , telecommunications , computer network
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