Distinguishability of N Composition Profiles In SiON Films On Si By Angle-Resolved X-ray Photoelectron Spectroscopy | Zendy

C. J. Powell | Zendy; Wolfgang Werner | Zendy; Werner Smekal | Zendy; David G. Seiler | Zendy; Alain C. Diebold | Zendy; Robert McDonald | Zendy; C. Michael Garner | Zendy; Dan Herr | Zendy; Rajinder P. Khosla | Zendy; Erik M. Secula | Zendy

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Distinguishability of N Composition Profiles In SiON Films On Si By Angle-Resolved X-ray Photoelectron Spectroscopy

Author(s) -

C. J. Powell,

Wolfgang Werner,

Werner Smekal,

David G. Seiler,

Alain C. Diebold,

Robert McDonald,

C. Michael Garner,

Dan Herr,

Rajinder P. Khosla,

Erik M. Secula

Publication year - 2007

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.177

H-Index - 75

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/1.2799388

Subject(s) - x ray photoelectron spectroscopy , photoelectric effect , materials science , spectrum analyzer , solid angle , attenuation , scattering , analytical chemistry (journal) , atomic physics , attenuation length , nist , spectral line , substrate (aquarium) , molecular physics , optics , chemistry , nuclear magnetic resonance , physics , optoelectronics , detector , oceanography , chromatography , astronomy , geology , natural language processing , computer science

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