Open AccessCMP Control of Multi-Layer Inter-Layer Dielectrics (ILD) using X-ray Reflectivity
Author(s) -
Ross E. Bryant,
Hethel Porter,
Jesus Gallegos,
Jeremy O'Dell,
Dileep Agnihotri,
David G. Seiler,
Alain C. Diebold,
Robert McDonald,
C. Michael Garner,
Dan Herr,
Rajinder P. Khosla,
Erik M. Secula
Publication year - 2007
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.2799373
Subject(s) - materials science , dielectric , x ray reflectivity , layer (electronics) , thin film , stack (abstract data type) , optoelectronics , reflectivity , semiconductor , optics , nanotechnology , computer science , physics , programming language
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