Integrated optical readout for miniaturization of cantilever-based sensor system | Zendy

Maria Nordström | Zendy; Dan A. Zauner | Zendy; Montserrat Calleja | Zendy; Jörg Hübner | Zendy; Anja Boisen | Zendy

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Integrated optical readout for miniaturization of cantilever-based sensor system

Author(s) -

Maria Nordström,

Dan A. Zauner,

Montserrat Calleja,

Jörg Hübner,

Anja Boisen

Publication year - 2007

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.2779851

Subject(s) - cantilever , miniaturization , fabrication , materials science , waveguide , optoelectronics , optics , characterization (materials science) , sensitivity (control systems) , bending , nanotechnology , electronic engineering , physics , composite material , engineering , medicine , alternative medicine , pathology

The authors present the fabrication and characterization of an integrated optical readout scheme based on single-mode waveguides for cantilever-based sensors. The cantilever bending is read out by monitoring changes in the optical intensity of light transmitted through the cantilever that also acts as a waveguide. The complete system is fabricated in the photosensitive polymer SU-8. They show theoretical calculations on the expected sensitivity both when operated in air and liquid and compare these with experimental characterization of the system in air where the cantilever is deflected mechanically. The experimental results compare well with the results obtained from the theoretical calculations

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