Segregation and precipitation of Er in Ge
Author(s) -
S. O. Kucheyev,
J. E. Bradby,
S. Ruffell,
C. P. Li,
T. E. Felter,
A. V. Hamza
Publication year - 2007
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.2743881
Subject(s) - recrystallization (geology) , annealing (glass) , materials science , amorphous solid , germanium , ion , doping , redistribution (election) , precipitation , ion implantation , chemical physics , chemical engineering , crystallography , silicon , chemistry , metallurgy , optoelectronics , physics , meteorology , paleontology , organic chemistry , politics , political science , law , biology , engineering
Although Er-doped Ge nanomaterials are attractive for photonic applications, very little is known about the basic properties of Er in Ge. Here, the authors study the annealing behavior of Ge implanted with keV Er ions to doses resulting in ≲1at.% of Er. Large redistribution of Er, with segregation at the amorphous/crystalline interface, starts at ≳500°C, while lower temperatures are required for material recrystallization. However, even at 400°C, Er forms precipitates. The concentration of Er trapped in the bulk after recrystallization decreases with increasing temperature but is independent of the initial bulk Er concentration for the range of ion doses studied here.
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom