Open AccessInvited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy
Author(s) -
Thomas E. Beechem,
Samuel Graham,
Sean P. Kearney,
Leslie M. Phinney,
Justin R. Serrano
Publication year - 2007
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.2738946
Subject(s) - raman spectroscopy , materials science , temperature measurement , stress (linguistics) , microelectronics , laser linewidth , measure (data warehouse) , signal (programming language) , deconvolution , optoelectronics , optics , computer science , physics , thermodynamics , laser , philosophy , linguistics , database , programming language
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