On-chip electron-impact ion source using carbon nanotube field emitters | Zendy

Christopher A. Bower | Zendy; Kristin H. Gilchrist | Zendy; Jeffrey R. Piascik | Zendy; Brian R. Stoner | Zendy; Srividya Natarajan | Zendy; Charles B. Parker | Zendy; Scott D. Wolter | Zendy; Jeffrey T. Glass | Zendy

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On-chip electron-impact ion source using carbon nanotube field emitters

Author(s) -

Christopher A. Bower,

Kristin H. Gilchrist,

Jeffrey R. Piascik,

Brian R. Stoner,

Srividya Natarajan,

Charles B. Parker,

Scott D. Wolter,

Jeffrey T. Glass

Publication year - 2007

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.2715457

Subject(s) - carbon nanotube , field electron emission , materials science , ion , ion current , cathode , ion source , carbon nanotube quantum dot , atomic physics , electron , ionization , nanotube , optoelectronics , analytical chemistry (journal) , nanotechnology , chemistry , physics , organic chemistry , chromatography , quantum mechanics

A lateral on-chip electron-impact ion source utilizing a carbon nanotube field emission electron source was fabricated and characterized. The device consists of a cathode with aligned carbon nanotubes, a control grid, and an ion collector electrode. The electron-impact ionization of He, Ar, and Xe was studied as a function of field emission current and pressure. The ion current was linear with respect to gas pressure from 10-4 to 10-1 Torr. The device can operate as a vacuum ion gauge with a sensitivity of approximately 1 Torr-1. Ion currents in excess of 1 μA were generated. © 2007 American Institute of Physics

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