Open AccessThermal conduction from microcantilever heaters in partial vacuum
Author(s) -
Jungchul Lee,
Tanya L. Wright,
Mark R. Abel,
Erik O. Sunden,
Alexei Marchenkov,
Samuel Graham,
William P. King
Publication year - 2007
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.2403862
Subject(s) - cantilever , microscale chemistry , thermal conductivity , thermal conduction , thermal , knudsen number , materials science , conductance , thermal resistance , helium , chemistry , composite material , thermodynamics , condensed matter physics , physics , mathematics education , mathematics , organic chemistry
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