Electrical property evaluation of manganese-fluorine codoping of lead zirconate titanate thin films: Compatibility between hard material and piezoelectric activity
Author(s) -
M. Detalle,
Denis Rémiens,
Laurent Lebrun,
Daniel Guyomar
Publication year - 2006
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.2369542
Subject(s) - materials science , piezoelectricity , lead zirconate titanate , thin film , ferroelectricity , dielectric , piezoelectric coefficient , composite material , doping , zirconate , sputter deposition , ceramic , sputtering , titanate , optoelectronics , nanotechnology
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