Fabry-Pérot interferometry for microplasma diagnostics | Zendy

Hajime Hojo | Zendy; A. Mase | Zendy

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Fabry-Pérot interferometry for microplasma diagnostics

Author(s) -

Hajime Hojo,

A. Mase

Publication year - 2006

Publication title -

review of scientific instruments

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.605

H-Index - 165

eISSN - 1089-7623

pISSN - 0034-6748

DOI - 10.1063/1.2351910

Subject(s) - fabry–pérot interferometer , interferometry , plasma , microplasma , materials science , plasma diagnostics , electron density , optics , transmittance , astronomical interferometer , electron , dielectric , optoelectronics , physics , wavelength , quantum mechanics

A new method for determining the electron density of a thin plasma by means of Fabry-Pérot interferometry is proposed. The interferometer consists of two plasma layers and dielectric material surrounded by two plasma layers. The transmittance of electromagnetic waves across the interferometer is calculated, and Fabry-Pérot resonances are demonstrated. It is shown that the electron density can be determined from the measurement of the Fabry-Pérot resonance frequencies. This method can also be applied to the measurement of conduction electron density in semiconductor films

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